High Aspect Ratio Micromirrors With Large Static Rotation and Piston Actuation
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: IEEE Photonics Technology Letters
سال: 2004
ISSN: 1041-1135
DOI: 10.1109/lpt.2004.828351